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    ILT ??? ?? ??? ?? ???

    2022? 5? 10?
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    ILT(Inverse Lithography Technology)? 2003? ?? ?? ?? ? ?????? Danping Peng? UCLA? Stanley Osher, Eli Yabonovitch ??? ???? Dan Abrams, Jack Herrik? ??? ???? Luminescent Technologies Inc.?? ????? ???? ??? ??? ?????.

    ?? ILT? ????? ??? ???? ?? ??? ??? ???? ?? ??? ???? ??? ??? ??? ???? ????????. ???? ???? ??? ??? ??? ?? ILT? ??? ??? ??? ??? ????.

    ILT? ?? ?? ?? ??? ? ?? ??? ?? ??? ????? ?? ??? ????? ??? ???????. ??? ?? ? ??? ???? ?? ILT ???? ????? ?????.

    • ILT ???? ??? ??? ???? ???? 10?? ?? ??? ??? ??? ??????.
    • ILT? ?? ?? ????? ??? ??? ? ?? ???? ? ?? ?? ??? ??? ????.
    • ILT ???? ?? ??? ???? ??(?? ??? ?? ??? 6~7?) ??? ?(VSB) ???? ???? ??? ?? ??? ?? ?????.
    • ASML? ?? ? ??? ?? ??? ? ??? ?? ????? ???? ????, ??? ??? ???? ???? ?? ?? ??? ??? ? ?????.

    ??? ??? ILT? ?? ? ??? ??? ??? ?? ? ??? ??? ?? ???? ????? ??? ?? ?? ??(OPC)? ?????? ???? ? ???????.

    ILT ??

    20? ?? ???? ???? ?? ??? ??? ??? ???.?? ?? ??? 7nm ??? ???? ??? ? ?? ??? ?? ? ??? ???. ??? ILT?? ??? ??? ??? ???? ??? ??? ??? ??? ??? ???? ? ?? ??? ??? ????.

    ?? GPU?? ????? ?????? ???? ??? CPU ??? ???? 10? ?? ??? ????, ?? ??(ML)? ??? ?? ???? ??? ?? ILT ??? ??? ?? ???????.

    ?? ? ??? ???? ??? ?? ?? ??? ???? ?? ???? ??? ?? ??? HVM?? ????? ???????.

    ?????, ??? ????? ???? ??? ?? ? ???? ???? ILT? ?? ?? ???? ??? ??? ????? ??? ?? ???? ??? ?????.

    GPU ???? ?? ??? ?? ? ? ??????? ILT? ??? ?? ??? ?? ????. ?? ??? ?? ? ?? ?? ??? ??? ??? ???? ???? ??? ? ??? ?????.

    ?? ? ???? ?? ???? ILT ??? ??? ??

    ?? ???? ???? ILT? ????? ????? ?? ??? ?? ?? ??? ???? ???.

    • ? ?? ??
    • ??? OPC? ??? ??? ?? ??
    • ??? ???? ?? ??

    ? ?? ??

    ILT? ??? ??? ??? ????? ?? ? ?? ??? ?????. ??? ?? GPU ??? ?? ? ? ??(DL)? ????? ??? ??? ??? ????? ???? ? ??? ??? ?? ?????.

    ??? OPC? ??? ??? ?? ??

    ???, ??? ???? ?? ??? ???? ?? ?? ??? ???? ??? ????? ??? OPC? ??? ??? ?? ??(MRC)? ???? ???. ??? ?????? ??? ? ? ?? ??? ???? ?? ??? ??? ??? ?? ??? ? ??? ??? ?? ??? ??? ??? ???? ?????.

    MRC? ???? ?? ????? CD/?? ? ??? ? ??? ???, ??? ??(? ???? ?? ??)? ???? ?? ???? ?? ??? ??? ??? ????.

    ??? ???? ?? ??

    ????? ILT?? ??? ???? ?? ??? ??? ??? ??? ?? ?? ???? ??? ???. ?? ??? ??? ?? ???? ??? ??, ??, ?? ? ?? ?? ?? ????? ?? ?????.

    EDA ???

    ?? ???? ?? EDA ????? ??? ???? ?????, ?? ?????(EDA ????, ?? ???? ? ????)? ???? ?? ?? ??? ??? ?? ?? ??? ???????. 

    GPU + ? ??: GPU? ILT? ??? ???? ???? ???

    NVIDIA? EDA ????? ??? ????? ?? ?? ILT ???? ?? ??????. NVIDIA GPU ???? ???? NVIDIA SDK ? ?????? ???? ????? ? ILT ??? ??? ????? ??????.

    • CUDA
    • cuFFT
    • cuSOLVER
    • NVPR: OpenGL ??? ??? NVIDIA ?? ???
    • Optix RT ???
    • ? ??

    NVIDIA V100 32GB GPU?? ???? CPU ??? ?? ILT ?? ??? 10? ?? ???????. ?? ? ???? ???? ?? ?? ?? ???? 20? ?? ??? ??? ?? ??????.

    ??? ???? ??? ?? ??? ??????. ?? NVIDIA A100 80GB GPU ?????? ?? ILT ??? ???? ?? ??? ???? ?? ?? ? ???? ?? ????.

    Bar chart shows the GPU speedup relative to a CPU core for ILT forward model simulation as split by its key components.
    ?? 1.?? ILT ??? ??? GPU ?? ??

    ILT? ?? ?? ??

    ?? ? ??? ?? ?? ? ????? ? ??? ??? ??? ?????? ?? ? ???? ????. ??? ??? OPC/ILT? ??? ??? ??? ??? ????, ?? ?? ??? ??? ???? ?? ??? ??? ?????.

    ?? ????? ??? ?? GPU? HPC ??? ?? ???? ??? ??? ???? ?? ?? ?? ??? ?? ????? ???? ? ?? ??? ? ????. ? ?????? HPC + ???(??? ????) + ?? ??/? ??? ?? ?? ?? ????? ?? ??? ? ??? ?? ?? ? ??? ? ???, ? ?? ??? ?? ? ?? ?? ??????? ??? ??? ???? ?????.

    ?, GPU? ???? ? ??? ??? ??? GPU? ???? ???? ???????.

    HVM?? ILT ???? ??? ??? ? ???? ?? ?????? ???? ? ??? ???? ???.

    • EDA ????? ??? OPC ????? ? ?? ??? ?? ??? ?? ?? ? ???? ???? ?? ??? ??? ???? ??? ??? ??? ??? ? ??? ?? ???.
    • ??? ??? ??(MDP) ????? ??? ??? ??? ???? ??? ? ??? ???? ???? ???.
    • ??? ?? ? ?? ?? ????? ???? ??? ??, ??? ? ??? ? ??? ???? ????? ??????? ???.

    ??? ILT ??? ??? ???? ?? ? ?? ??? ?????. ?? ????? ??? ???? ?? ???? ??? ?? ??? ??? ?? ? ??, ?? ??? ?? ????? ?? ??? ??? ? ????. ??? ??? ???? ??? ??? ??? ??? ??? ?? ??? ILT? ??? ?? ?? ??? ?? ??? ? ????.

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    Tags

    Deep Learning | machine learning | Numerical Algorithms | technical walkthrough

    ??? ??

    Danping Peng ???
    Danping Peng got his BS and MS degree from Peking University, Ph.D. from UCLA, all in applied mathematics. At UCLA, he studied under Prof. Stanley Osher on algorithms for level set method and its application in moving boundary problems. After a brief stint in the financial industry, he joined Luminescent, a Silicon Valley start-up founded by Prof. Osher and others as the first engineer and implemented the first ILT software using the level set method, based on his Ph.D. work. He managed the core algorithm team of Luminescent from 2002 to 2005 and became its chief scientist in 2005, CTO in 2010 until its acquisition by Synopsys in 2012 of the mask synthesis business and by KLA in 2014 of the mask inspection business. At KLA, he led the successful integration of Luminescent’s product lines into KLA’s and later built and managed their Advanced Technology Software Team. He joined TSMC in June of 2015 and built its in-house OPC modeling team at San Jose, CA.
    Srinivas Kodiyalam ???
    Srinivas Kodiyalam is a senior DevRel manager on the Industrial HPC & AI team at NVIDIA. He got his PhD from UC Santa Barbara in mechanical engineering. He is presently focused on Industrial HPC workloads and applications. Prior to NVIDIA, Srinivas has worked in product engineering and development at General Electric R&D Center and Lockheed Martin Space Systems Company; in software development at MSC Software and CTO of Engineous Software (acquired by Dassault Systemes); and in HPC and Storage at SGI and NetApp. Srinivas is an Associate Fellow of AIAA (American Institute of Aeronautics and Astronautics).
    Andrew Liu ???
    Andrew Liu is a senior solution architect at NVIDIA, assisting customers in building innovative solutions based on NVIDIA technology. His research interests are in the area of applying machine learning algorithms to real-world problems. Prior to NVIDIA, Andrew was a machine learning engineer at Foxconn. He took the lead of the analytical team and developed various kinds of predictive modeling projects centered around manufacturing processes, including defect inspection and predictive maintenance, and so on. During his Ph.D. program, he worked as a visiting scholar at Los Alamos National Laboratory's Bio Science Team, working on Human and Environmental Microbiome projects.

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